(001)-oriented PbTiO3 ferroelectric thin films grown on Si by metal-organic chemical vapour deposition

Abstract

PbTiO3 ferroelectric thin films have been prepared on Si(001) by metal-organic chemical vapour deposition. The as-grown films were characterized by scanning electron microscopy, X-ray diffraction and Raman spectroscopy. It is shown that the films were highly (001) oriented and had essentially the same lattice constants as the bulk single crystal. However, the as-grown films were subject to internal stress as shown by a downshift in the Raman modes when compared with a bulk single crystal.